\u968f\u7740\u73b0\u4ee3\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907<\/a>\u5728\u6c34\u8d28\u76d1\u6d4b<\/a>\u4e2d\u7684\u5e94\u7528\u8d8a\u6765\u8d8a\u5e7f\u6cdb\u3002MEMS\u6280\u672f\u662f\u4e00\u79cd\u9ad8\u7cbe\u5ea6\u3001\u5fae\u578b\u5316\u7684\u7535\u5b50\u8bbe\u5907\u6280\u672f\uff0c\u56e0\u5176\u5c0f\u5de7\u3001\u9ad8\u6548\u3001\u9ad8\u53ef\u9760\u6027\u7b49\u7279\u70b9\uff0c\u9010\u6e10\u6210\u4e3a\u4e86\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u7684\u91cd\u8981\u9009\u62e9\u3002\u672c\u6587\u5c06\u4ecb\u7ecd\u57fa\u4e8eMEMS\u6280\u672f\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u7684\u7814\u7a76\u73b0\u72b6\u548c\u53d1\u5c55\u8d8b\u52bf\u3002<\/p>\n \u4e00\u3001\u7814\u7a76\u73b0\u72b6<\/p>\n \u76ee\u524d\uff0c\u57fa\u4e8eMEMS\u6280\u672f\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5df2\u7ecf\u5f97\u5230\u4e86\u5e7f\u6cdb\u7684\u5e94\u7528\u548c\u7814\u7a76\u3002\u4e3b\u8981\u6709\u4ee5\u4e0b\u51e0\u79cd\u7c7b\u578b\uff1a<\/p>\n 1. \u4f20\u611f\u5668\u6280\u672f<\/p>\n \u4f20\u611f\u5668\u6280\u672f\u662f\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u4e2d\u6700\u5e38\u7528\u7684\u6280\u672f\u4e4b\u4e00\u3002MEMS\u4f20\u611f\u5668\u662f\u4e00\u79cd\u57fa\u4e8e\u5fae\u673a\u68b0\u7ed3\u6784\u7684\u4f20\u611f\u5668\uff0c\u5177\u6709\u9ad8\u7cbe\u5ea6\u3001\u9ad8\u7075\u654f\u5ea6\u3001\u9ad8\u53ef\u9760\u6027\u7b49\u7279\u70b9\u3002\u5e38\u7528\u7684MEMS\u4f20\u611f\u5668\u5305\u62ec\u7535\u5bb9\u3001\u7535\u611f\u3001\u538b\u7535\u3001\u78c1\u654f\u7b49\u3002<\/p>\n 2. \u5149\u5b66\u4f20\u611f\u5668\u6280\u672f<\/p>\n \u5149\u5b66\u4f20\u611f\u5668\u6280\u672f\u662f\u4e00\u79cd\u57fa\u4e8e\u5149\u5b66\u539f\u7406\u7684\u4f20\u611f\u5668\u6280\u672f\uff0c\u53ef\u4ee5\u901a\u8fc7\u68c0\u6d4b\u6c34\u4e2d\u9897\u7c92\u7269\u548c\u6eb6\u89e3\u7269\u7684\u6d53\u5ea6\u6765\u76d1\u6d4b\u6c34\u8d28\u3002\u5e38\u7528\u7684\u5149\u5b66\u4f20\u611f\u5668\u5305\u62ec\u53ef\u89c1\u5149\u3001\u7ea2\u5916\u7ebf\u4f20\u611f\u5668\u7b49\u3002<\/p>\n 3. \u96f7\u8fbe\u4f20\u611f\u5668\u6280\u672f<\/p>\n \u96f7\u8fbe\u4f20\u611f\u5668\u6280\u672f\u662f\u4e00\u79cd\u901a\u8fc7\u53d1\u5c04\u7535\u78c1\u6ce2\u5e76\u63a5\u6536\u56de\u6ce2\u6765\u68c0\u6d4b\u6c34\u4e2d\u9897\u7c92\u7269\u548c\u6eb6\u89e3\u7269\u6d53\u5ea6\u7684\u6280\u672f\u3002MEMS\u96f7\u8fbe\u4f20\u611f\u5668\u5177\u6709\u9ad8\u7cbe\u5ea6\u3001\u9ad8\u5206\u8fa8\u7387\u3001\u9ad8\u53ef\u9760\u6027\u7b49\u7279\u70b9\u3002<\/p>\n 4. \u6fc0\u5149\u4f20\u611f\u5668\u6280\u672f<\/p>\n \u6fc0\u5149\u4f20\u611f\u5668\u6280\u672f\u662f\u4e00\u79cd\u901a\u8fc7\u68c0\u6d4b\u6fc0\u5149\u675f\u7684\u53cd\u5c04\u548c\u6563\u5c04\u6765\u68c0\u6d4b\u6c34\u4e2d\u9897\u7c92\u7269\u548c\u6eb6\u89e3\u7269\u6d53\u5ea6\u7684\u6280\u672f\u3002\u5e38\u7528\u7684\u6fc0\u5149\u4f20\u611f\u5668\u5305\u62ec\u6fc0\u5149\u96f7\u8fbe\u3001\u6fc0\u5149\u6d4b\u8ddd\u4eea\u7b49\u3002<\/p>\n \u4e8c\u3001\u53d1\u5c55\u8d8b\u52bf<\/p>\n \u968f\u7740\u79d1\u6280\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u672a\u6765\u57fa\u4e8eMEMS\u6280\u672f\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5c06\u5177\u6709\u4ee5\u4e0b\u53d1\u5c55\u8d8b\u52bf\uff1a<\/p>\n 1. \u5fae\u578b\u5316<\/p>\n \u672a\u6765\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5c06\u66f4\u52a0\u5fae\u578b\u5316\uff0c\u5c3a\u5bf8\u5c06\u7f29\u5c0f\u5230\u5fae\u7c73\u7ea7\u522b\uff0c\u751a\u81f3\u66f4\u5c0f\u3002\u8fd9\u5c06\u4f7f\u5f97\u8bbe\u5907\u66f4\u52a0\u4fbf\u643a\u3001\u6613\u4e8e\u643a\u5e26\uff0c\u5e76\u4e14\u53ef\u4ee5\u66f4\u7cbe\u786e\u5730\u76d1\u6d4b\u6c34\u8d28\u3002<\/p>\n 2. \u591a\u529f\u80fd\u5316<\/p>\n \u672a\u6765\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5c06\u5177\u6709\u66f4\u591a\u7684\u529f\u80fd\uff0c\u4f8b\u5982\u53ef\u4ee5\u76d1\u6d4b\u6c34\u4e2d\u7684\u6eb6\u89e3\u6c27\u3001PH\u503c\u3001\u6c28\u6c2e\u3001\u603b\u6c2e\u7b49\u6307\u6807\uff0c\u4ee5\u53ca\u53ef\u4ee5\u5b9e\u65f6\u76d1\u6d4b\u6c34\u8d28\u53d8\u5316\u3001\u62a5\u8b66\u7b49\u529f\u80fd\u3002<\/p>\n 3. \u667a\u80fd\u5316<\/p>\n \u672a\u6765\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5c06\u5177\u6709\u667a\u80fd\u5316\u7684\u7279\u70b9\uff0c\u53ef\u4ee5\u901a\u8fc7\u6570\u636e\u5206\u6790\u548c\u5904\u7406\uff0c\u5bf9\u6c34\u8d28\u8fdb\u884c\u66f4\u52a0\u5168\u9762\u3001\u79d1\u5b66\u7684\u5206\u6790\u3002<\/p>\n 4. \u9ad8\u6548\u8282\u80fd<\/p>\n \u672a\u6765\u7684\u5fae\u578b\u6c34\u8d28\u76d1\u6d4b\u8bbe\u5907\u5c06\u5177\u6709\u9ad8\u6548\u8282\u80fd\u7684\u7279\u70b9\uff0c\u53ef\u4ee5\u5b9e\u73b0\u5bf9\u6c34\u8d28\u7684\u9ad8\u6548\u76d1\u6d4b\uff0c\u540c\u65f6\u8282\u7ea6\u80fd\u6e90\uff0c\u964d\u4f4e\u8fd0\u884c\u6210\u672c\u3002<\/p>\n 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